Measurement of local thickness by electron energy-loss spectroscopy
RF Egerton, SC Cheng - Ultramicroscopy, 1987 - Elsevier
We review various methods which can be used to derive the thickness of an electron-
microscope specimen from its transmission energy-loss spectrum. We have applied a sum-
rule technique to various kinds of specimen, using a variety of electron-optical conditions,
and estimate its accuracy to be typically±10%(or±2nm if larger) over the thickness range 10–
150 nm. This method requires no knowledge of the physical or chemical properties of the
specimen other than its refractive index (∞ for metal). It involves only a low radiation dose …
microscope specimen from its transmission energy-loss spectrum. We have applied a sum-
rule technique to various kinds of specimen, using a variety of electron-optical conditions,
and estimate its accuracy to be typically±10%(or±2nm if larger) over the thickness range 10–
150 nm. This method requires no knowledge of the physical or chemical properties of the
specimen other than its refractive index (∞ for metal). It involves only a low radiation dose …