Four-dimensional scanning transmission electron microscopy (4D-STEM): From scanning nanodiffraction to ptychography and beyond

C Ophus - Microscopy and Microanalysis, 2019 - cambridge.org
Microscopy and Microanalysis, 2019cambridge.org
Scanning transmission electron microscopy (STEM) is widely used for imaging, diffraction,
and spectroscopy of materials down to atomic resolution. Recent advances in detector
technology and computational methods have enabled many experiments that record a full
image of the STEM probe for many probe positions, either in diffraction space or real space.
In this paper, we review the use of these four-dimensional STEM experiments for virtual
diffraction imaging, phase, orientation and strain mapping, measurements of medium-range …
Scanning transmission electron microscopy (STEM) is widely used for imaging, diffraction, and spectroscopy of materials down to atomic resolution. Recent advances in detector technology and computational methods have enabled many experiments that record a full image of the STEM probe for many probe positions, either in diffraction space or real space. In this paper, we review the use of these four-dimensional STEM experiments for virtual diffraction imaging, phase, orientation and strain mapping, measurements of medium-range order, thickness and tilt of samples, and phase contrast imaging methods, including differential phase contrast, ptychography, and others.
Cambridge University Press