Atomic layer deposition on 2D materials

HG Kim, HBR Lee - Chemistry of Materials, 2017 - ACS Publications
Chemistry of Materials, 2017ACS Publications
2D materials are layered crystalline materials and are the most attractive nanomaterials due
to their potentials in next-generation electronics. Because most 2D materials are atomically
thin, a suitable fabrication process without degradation of the original properties of the
material is required to realize 2D-material-based devices. Atomic layer deposition (ALD) is
an ideal technique for adding materials with atomic scaling precision to nanomaterials. Due
to the surface-sensitive reactions of ALD, growth on 2D materials is strongly affected by the …
2D materials are layered crystalline materials and are the most attractive nanomaterials due to their potentials in next-generation electronics. Because most 2D materials are atomically thin, a suitable fabrication process without degradation of the original properties of the material is required to realize 2D-material-based devices. Atomic layer deposition (ALD) is an ideal technique for adding materials with atomic scaling precision to nanomaterials. Due to the surface-sensitive reactions of ALD, growth on 2D materials is strongly affected by the surface properties of the 2D materials. In this Perspective, ALD growth on 2D materials is reviewed and discussed with previously reported results to provide insights to readers who are investigating 2D materials and relevant topics.
ACS Publications